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tom's Hardware on MSN7mon
China's SMEE files patent for an EUV chipmaking tool — tool aims to break the shackles of ASML export restrictionsThis week, it turned out that Shanghai Microelectronics Equipment (SMEE) had applied for a patent covering an EUV lithography ...
tom's Hardware on MSN2mon
China will likely reduce purchase of chipmaking tools this year as homegrown toolmakers ramp upHowever, China still struggles with key weaknesses ... and Nikon as Shanghai Micro Electronics Equipment (SMEE) can only make litho tools good enough for process technologies of 90nm and thicker ...
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