News

This week, it turned out that Shanghai Microelectronics Equipment (SMEE) had applied for a patent covering an EUV lithography ...
However, China still struggles with key weaknesses ... and Nikon as Shanghai Micro Electronics Equipment (SMEE) can only make litho tools good enough for process technologies of 90nm and thicker ...
likely benefiting manufacturers such as China’s sole semiconductor lithography specialist, Shanghai Micro Electronics Equipment Group (SMEE). The outlay was in response to the United States ...