The Center for X-Ray Optics at Lawrence Berkeley National Laboratory works to further science and technology using short wavelength optical systems and techniques.

The Center for X-Ray Optics is a one-of-a-kind facility with over 25 years experience providing short- wavelength optical solutions. From instrument develop-ment to world-leading scientific discovery, our vertically integrated structure allows us to tackle a full spectrum of research. The work performed by Center scientists and

The Center for X-Ray Optics advances science and technology using short wavelength optical systems and techniques. We create and operate advanced experimental systems to address national needs, support research in material, life, and environmental science, and extend the forefront of semiconductor manufacturing.

Mirrors and detectors are the foundation of soft x-ray science. CXRO routinely measures the reflectivity and scattering properties of the most advanced x-ray and EUV optics in the world.

The MET is a 0.3-NA extreme ultraviolet (EUV) microlithography tool situated on undulator beamline 12.0.1.3 of the Advanced Light Source at Lawrence Berkeley National Laboratory. The MET has a unique programmable coherence illuminator that allows it to achieve world-leading 12-nm imaging resolution.

Pioneering EUV and soft x-ray interferometry. New applications with short-wavelength lenses demand the highest quality optics ever made, and the most demanding tests to quantify them. CXRO has developed ultra-high-accuracy, wavefront-measuring interferometry and optical testing methods that have been adopted by leading-edge groups and optics ...

CXRO has been making, testing and utilizing multilayer x-ray mirrors since 1984. CXRO has made major contributions to understanding the physics and chemistry of these devices, and to their utilization in optical systems for a variety of research fields, including x-ray astronomy, plasma spectroscopy, x-ray lasers and synchrotron radiation research.

Using a double-exposure overlay technique, CXRO's Nanowriter team produced the world's highest resolution zone plate enabling imaging resolution of 12 nm. Visit zoneplate.lbl.gov to learn about Fresnel zone plate theory, design, tolerancing, fabrication, and applications.

The Center for X-Ray Optics is a multi-disciplined research group within Lawrence Berkeley National Laboratory's Materials Sciences Division . Notice to users. The world's highest performance microscope for imaging EUV lithography masks.

XM-1 combines: spatial resolution approaching 10 nm, elemental specificity, 70 ps temporal resolution (set by the bunch length of the x-ray pulses), and high sensitivity to spin configurations (via dichroism effects with polarized x-rays) making …