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Photolithography Overview for MEMS
12:03
YouTubeSupport Center for Microsystems Education
Photolithography Overview for MEMS
This is a short overview of the photolithography processes used to fabricate micro-sized devices. This presentation was produced by the Southwest Center for Microsystems Education (SCME). A supporting Photolithography Overview Learning Module can be downloaded from SCME's website (http://scme-nm.org), Educational Materials.
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